XPS and AFM Investigations of Ti-Al-N Coatings Fabricated Using DC Magnetron Sputtering at Various Nitrogen Flow Rates and Deposition Temperatures

Title
XPS and AFM Investigations of Ti-Al-N Coatings Fabricated Using DC Magnetron Sputtering at Various Nitrogen Flow Rates and Deposition Temperatures
Authors
Keywords
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Journal
Metals
Volume 7, Issue 2, Pages 52
Publisher
MDPI AG
Online
2017-02-15
DOI
10.3390/met7020052

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