AFM analysis of TiN, TiAlN, and TiAlSiN coatings prepared by cathodic arc ion plating

Title
AFM analysis of TiN, TiAlN, and TiAlSiN coatings prepared by cathodic arc ion plating
Authors
Keywords
TiN, TiAlN, and TiAlSiN coatings, AFM, 3D surface micro-topography, height analysis, power spectral density
Publisher
Springer Nature
Online
2016-10-12
DOI
10.1007/s11595-016-1495-4

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