Deposition of titanium nitride on Si(100) wafers using plasma focus

Published 2009 View Full Article

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Title
Deposition of titanium nitride on Si(100) wafers using plasma focus
Authors
Keywords
-
Journal
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS
Volume 267, Issue 5, Pages 768-772
Publisher
Elsevier BV
Online
2009-01-22
DOI
10.1016/j.nimb.2009.01.008

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