The effect of titanium current on structure and hardness of aluminium titanium nitride deposited by reactive unbalanced magnetron co-sputtering

Published 2011 View Full Article

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Title
The effect of titanium current on structure and hardness of aluminium titanium nitride deposited by reactive unbalanced magnetron co-sputtering
Authors
Keywords
-
Journal
THIN SOLID FILMS
Volume 519, Issue 15, Pages 4963-4968
Publisher
Elsevier BV
Online
2011-01-15
DOI
10.1016/j.tsf.2011.01.062

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