Towards understanding the machining mechanism of the atomic force microscopy tip-based nanomilling process
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Title
Towards understanding the machining mechanism of the atomic force microscopy tip-based nanomilling process
Authors
Keywords
Atomic force microscopy, Nanomilling, Nanochannels, Single-crystal silicon
Journal
INTERNATIONAL JOURNAL OF MACHINE TOOLS & MANUFACTURE
Volume -, Issue -, Pages 103701
Publisher
Elsevier BV
Online
2021-01-23
DOI
10.1016/j.ijmachtools.2021.103701
References
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