Towards understanding the machining mechanism of the atomic force microscopy tip-based nanomilling process
出版年份 2021 全文链接
标题
Towards understanding the machining mechanism of the atomic force microscopy tip-based nanomilling process
作者
关键词
Atomic force microscopy, Nanomilling, Nanochannels, Single-crystal silicon
出版物
INTERNATIONAL JOURNAL OF MACHINE TOOLS & MANUFACTURE
Volume -, Issue -, Pages 103701
出版商
Elsevier BV
发表日期
2021-01-23
DOI
10.1016/j.ijmachtools.2021.103701
参考文献
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