Fundamental investigation of subsurface damage in single crystalline silicon caused by diamond machining

Published 2008 View Full Article

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Title
Fundamental investigation of subsurface damage in single crystalline silicon caused by diamond machining
Authors
Keywords
-
Journal
PRECISION ENGINEERING-JOURNAL OF THE INTERNATIONAL SOCIETIES FOR PRECISION ENGINEERING AND NANOTECHNOLOGY
Volume 33, Issue 4, Pages 378-386
Publisher
Elsevier BV
Online
2008-11-26
DOI
10.1016/j.precisioneng.2008.10.008

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