Elastic–plastic deformation of single-crystal silicon in nano-cutting by a single-tip tool

Published 2019 View Full Article

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Title
Elastic–plastic deformation of single-crystal silicon in nano-cutting by a single-tip tool
Authors
Keywords
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Journal
JAPANESE JOURNAL OF APPLIED PHYSICS
Volume 58, Issue 8, Pages 086501
Publisher
Japan Society of Applied Physics
Online
2019-06-21
DOI
10.7567/1347-4065/ab2b71

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