Study on the machined depth when nanoscratching on 6H-SiC using Berkovich indenter: Modelling and experimental study

Published 2016 View Full Article

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Title
Study on the machined depth when nanoscratching on 6H-SiC using Berkovich indenter: Modelling and experimental study
Authors
Keywords
6H-SiC, Nanoscratching, Deformation
Journal
APPLIED SURFACE SCIENCE
Volume 368, Issue -, Pages 449-455
Publisher
Elsevier BV
Online
2016-02-15
DOI
10.1016/j.apsusc.2016.02.032

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