Atomic force microscopy-based repeated machining theory for nanochannels on silicon oxide surfaces

Published 2010 View Full Article

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Title
Atomic force microscopy-based repeated machining theory for nanochannels on silicon oxide surfaces
Authors
Keywords
-
Journal
APPLIED SURFACE SCIENCE
Volume 257, Issue 8, Pages 3627-3631
Publisher
Elsevier BV
Online
2010-11-21
DOI
10.1016/j.apsusc.2010.11.091

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