Effects of adatom mobility and Ehrlich–Schwoebel barrier on heteroepitaxial growth of scandium nitride (ScN) thin films

Title
Effects of adatom mobility and Ehrlich–Schwoebel barrier on heteroepitaxial growth of scandium nitride (ScN) thin films
Authors
Keywords
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Journal
APPLIED PHYSICS LETTERS
Volume 117, Issue 21, Pages 212101
Publisher
AIP Publishing
Online
2020-11-23
DOI
10.1063/5.0027091

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