Effects of adatom mobility and Ehrlich–Schwoebel barrier on heteroepitaxial growth of scandium nitride (ScN) thin films
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Title
Effects of adatom mobility and Ehrlich–Schwoebel barrier on heteroepitaxial growth of scandium nitride (ScN) thin films
Authors
Keywords
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Journal
APPLIED PHYSICS LETTERS
Volume 117, Issue 21, Pages 212101
Publisher
AIP Publishing
Online
2020-11-23
DOI
10.1063/5.0027091
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