Correlation between crystallization and oxidation process of ScN films exposed to air

Published 2020 View Full Article

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Title
Correlation between crystallization and oxidation process of ScN films exposed to air
Authors
Keywords
-
Journal
APPLIED SURFACE SCIENCE
Volume -, Issue -, Pages 145968
Publisher
Elsevier BV
Online
2020-03-03
DOI
10.1016/j.apsusc.2020.145968

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