Effect of deposition pressure on the microstructure and thermoelectric properties of epitaxial ScN(001) thin films sputtered onto MgO(001) substrates
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Title
Effect of deposition pressure on the microstructure and thermoelectric properties of epitaxial ScN(001) thin films sputtered onto MgO(001) substrates
Authors
Keywords
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Journal
JOURNAL OF MATERIALS RESEARCH
Volume 30, Issue 05, Pages 626-634
Publisher
Cambridge University Press (CUP)
Online
2015-02-16
DOI
10.1557/jmr.2015.30
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- (2008) J.M. Gregoire et al. THIN SOLID FILMS
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