Effects of deposition conditions on the ferroelectric properties of (Al1−xScx)N thin films
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Title
Effects of deposition conditions on the ferroelectric properties of (Al1−xScx)N thin films
Authors
Keywords
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Journal
JOURNAL OF APPLIED PHYSICS
Volume 128, Issue 11, Pages 114103
Publisher
AIP Publishing
Online
2020-09-18
DOI
10.1063/5.0015281
References
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