A combined approach to predict spatial temperature evolution and its consequences during FIB processing of soft matter

Chemical degradation and morphological instabilities during focused ion beam prototyping of polymers

(2013) A. Orthacker et al.   PHYSICAL CHEMISTRY CHEMICAL PHYSICS

Three-dimensional nanofabrication of polystyrene by focused ion beam

(2012) C.C. LEE et al.   JOURNAL OF MICROSCOPY

New possibilities for soft matter applications: eliminating technically induced thermal stress during FIB processing

(2012) Roland Schmied et al.   RSC Advances

Multi-scale modeling of localized heating caused by ion bombardment

(2011) Michael T. Myers et al.   NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS

Minimization of focused ion beam damage in nanostructured polymer thin films

(2010) Suhan Kim et al.   ULTRAMICROSCOPY

Study of temperature rise during focused Ga ion beam irradiation using nanothermo-probe

(2009) Neeraj Shukla et al.   APPLIED SURFACE SCIENCE

Surface amorphization, sputter rate, and intrinsic stresses of silicon during low energy Ga+ focused-ion beam milling

(2009) Lars Pastewka et al.   NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS

Gas-assisted focused electron beam and ion beam processing and fabrication

(2008) Ivo Utke et al.   JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B

In situ lift-out: Steps to improve yield and a comparison with other FIB TEM sample preparation techniques

(2008) R.M. Langford et al.   MICRON