Nanoscale 3D printing process using aerodynamically focused nanoparticle (AFN) printing, micro-machining, and focused ion beam (FIB)

A novel nanoscale 3D printing process was developed by integrating nanoparticle printing, micro-machining, and focused ion beam technology. Aerodynamically focused nanoparticle (AFN) printing, a room-temperature direct printing technique using shock-induced aerosol generation, was adopted for material formation, and focused ion beam (FIB) was used for profiling the positioned material. Micro-machining was used to assist and bridge these two processes at different scales, using tools with diameters of 30 mu m. Various 2.5D and 3D structures were printed using metal/ceramic nanoparticles with no solvent or post-treatment technique. Some applications are shown in the range from sub-micron to hundreds of micrometers. (C) 2015 CIRP.