Metal‐Organic Chemical Vapor Deposition of Aluminum Scandium Nitride

标题
Metal‐Organic Chemical Vapor Deposition of Aluminum Scandium Nitride
作者
关键词
-
出版物
Physica Status Solidi-Rapid Research Letters
Volume -, Issue -, Pages 1900535
出版商
Wiley
发表日期
2019-11-01
DOI
10.1002/pssr.201900535

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