Flexible and Transparent Aluminum‐Nitride‐Based Surface‐Acoustic‐Wave Device on Polymeric Polyethylene Naphthalate

Advances in piezoelectric thin films for acoustic biosensors, acoustofluidics and lab-on-chip applications

(2017) Y.Q. Fu et al.   PROGRESS IN MATERIALS SCIENCE

Stretchable, Skin-Mountable, and Wearable Strain Sensors and Their Potential Applications: A Review

(2016) Morteza Amjadi et al.   ADVANCED FUNCTIONAL MATERIALS

AlN-based flexible piezoelectric skin for energy harvesting from human motion

(2016) Francesco Guido et al.   MICROELECTRONIC ENGINEERING

The Characterization of Surface Acoustic Wave Devices Based on AlN-Metal Structures

(2016) Lin Shu et al.   SENSORS

AlN texturing and piezoelectricity on flexible substrates for sensor applications

(2015) Emanuele Smecca et al.   APPLIED PHYSICS LETTERS

Low stiffness tactile transducers based on AlN thin film and polyimide

(2015) V. M. Mastronardi et al.   APPLIED PHYSICS LETTERS

AlN/SiO2/Si3N4/Si(100)-Based CMOS Compatible Surface Acoustic Wave Filter With −12.8-dB Minimum Insertion Loss

(2015) Udo Christian Kaletta et al.   IEEE TRANSACTIONS ON ELECTRON DEVICES

Evaluation of the piezoelectric properties and voltage generation of flexible zinc oxide thin films

(2015) M Laurenti et al.   NANOTECHNOLOGY

Influence of substrate temperature on the crystalline quality of AlN layers deposited by RF reactive magnetron sputtering

(2015) Tomoyuki Kumada et al.   AIP Advances

Viscosity and density decoupling method using a higher order Lamb wave sensor

(2014) Tao Wang et al.   JOURNAL OF MICROMECHANICS AND MICROENGINEERING

Discrete microfluidics based on aluminum nitride surface acoustic wave devices

(2014) J. Zhou et al.   Microfluidics and Nanofluidics

Flexible Piezoelectric Thin-Film Energy Harvesters and Nanosensors for Biomedical Applications

(2014) Geon-Tae Hwang et al.   Advanced Healthcare Materials

Design and fabrication of SAW pressure, temperature and impedance sensors using novel multiphysics simulation models

(2013) G.A. Borrero et al.   SENSORS AND ACTUATORS A-PHYSICAL

Flexible-CMOS and biocompatible piezoelectric AlN material for MEMS applications

(2013) Nathan Jackson et al.   Smart Materials and Structures

Flexible surface acoustic wave resonators built on disposable plastic film for electronics and lab-on-a-chip applications

(2013) Hao Jin et al.   Scientific Reports

Graphene-based transparent strain sensor

(2012) Sang-Hoon Bae et al.   CARBON

Film bulk acoustic resonator pressure sensor with self temperature reference

(2012) X L He et al.   JOURNAL OF MICROMECHANICS AND MICROENGINEERING

Flexible piezoelectric cantilevers fabricated on polyimide substrate

(2012) S. Petroni et al.   MICROELECTRONIC ENGINEERING

Acoustoelectric effects in reflection of leaky acoustic waves from LiTaO3 crystal surface coated with metal film

(2011) R. Rimeika et al.   APPLIED PHYSICS LETTERS

Transportation and mixing of droplets by surface acoustic wave

(2011) An-Liang Zhang et al.   TALANTA

Synthesis of c-axis oriented AlN thin films on different substrates: A review

(2010) G.F. Iriarte et al.   MATERIALS RESEARCH BULLETIN

Materials and Mechanics for Stretchable Electronics

(2010) J. A. Rogers et al.   SCIENCE

Development of SAW-based multi-gas sensor for simultaneous detection of CO2 and NO2

(2010) Chunbae Lim et al.   SENSORS AND ACTUATORS B-CHEMICAL

Effect of substrate roughness on c-oriented AlN thin films

(2009) Alvaro Artieda et al.   JOURNAL OF APPLIED PHYSICS

Surface acoustic wave induced streaming and pumping in 128° Y-cut LiNbO3for microfluidic applications

(2009) X Y Du et al.   JOURNAL OF MICROMECHANICS AND MICROENGINEERING

Recent developments on ZnO films for acoustic wave based bio-sensing and microfluidic applications: a review

(2009) Y.Q. Fu et al.   SENSORS AND ACTUATORS B-CHEMICAL

Influence of ZnO buffer layer thickness on the electrical and optical properties of indium zinc oxide thin films deposited on PET substrates

(2007) Chongmu Lee et al.   CERAMICS INTERNATIONAL