Flexible piezoelectric cantilevers fabricated on polyimide substrate

Published 2012 View Full Article

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Title
Flexible piezoelectric cantilevers fabricated on polyimide substrate
Authors
Keywords
-
Journal
MICROELECTRONIC ENGINEERING
Volume 98, Issue -, Pages 603-606
Publisher
Elsevier BV
Online
2012-06-08
DOI
10.1016/j.mee.2012.05.055

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