Journal
SENSORS
Volume 16, Issue 4, Pages -Publisher
MDPI
DOI: 10.3390/s16040526
Keywords
AlN film; TC4; surface acoustic wave; layered structure; simulation
Funding
- NSFC [61223002]
- Sichuan Youth Science and Technology Innovation Research Team Funding [2011JTD0006]
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We report in this paper on the study of surface acoustic wave (SAW) resonators based on an AlN/titanium alloy (TC4) structure. The AlN/TC4 structure with different thicknesses of AlN films was simulated, and the acoustic propagating modes were discussed. Based on the simulation results, interdigital transducers with a periodic length of 24 mu m were patterned by lift-off photolithography techniques on the AlN films/TC4 structure, while the AlN film thickness was in the range 1.5-3.5 mu m. The device performances in terms of quality factor (Q-factor) and electromechanical coupling coefficient (k(2)) were determined from the measure S-11 parameters. The Q-factor and k2 were strongly dependent not only on the normalized AlN film thickness but also on the full-width at half-maximum (FWHM) of AlN (002) peak. The dispersion curve of the SAW phase velocity was analyzed, and the experimental results showed a good agreement with simulations. The temperature behaviors of the devices were also presented and discussed. The prepared SAW resonators based on AlN/TC4 structure have potential applications in integrated micromechanical sensing systems.
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