Journal
CERAMICS INTERNATIONAL
Volume 34, Issue 4, Pages 1093-1096Publisher
ELSEVIER SCI LTD
DOI: 10.1016/j.ceramint.2007.09.083
Keywords
optical properties; electrical properties; transparent conducting oxide; ZnO
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The influence of the ZnO buffer layer thickness on the electrical and optical properties of In2O3-10 wt.% ZnO and ZnO bilayers deposited on polyethylene terephthalate (PET) substrates by RF magnetron sputtering were investigated. The optimum ZnO buffer layer thickness was found to be 90 nm which gives the lowest electrical resistivity of the bilayer of IZO and ZnO deposited on the PET substrate. The surface roughness decreases and diffusion of moisture and gas is more efficiently restrained, which contributes to lower the resistivity of the bilayer as the ZnO buffer layer thickness is increased. On the other hand, the total resistivity of the bilayer increases as the ZnO buffer layer thickness is increased because the resistivity of ZnO is higher than that of IZO. Introduction of a ZnO buffer layer does not nearly affect the IZO/ZnO/PET sample. (c) 2007 Elsevier Ltd and Techna Group S.r.l. All rights reserved.
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