AlN texturing and piezoelectricity on flexible substrates for sensor applications

Wide bandgap semiconductor thin films for piezoelectric and piezoresistive MEMS sensors applied at high temperatures: an overview

(2013) M. A. Fraga et al.   MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS

Flexible-CMOS and biocompatible piezoelectric AlN material for MEMS applications

(2013) Nathan Jackson et al.   Smart Materials and Structures

Interfacial characteristics of polyethylene terephthalate-based piezoelectric multi-layer films

(2013) Z.H. Liu et al.   THIN SOLID FILMS

Tactile multisensing on flexible aluminum nitride

(2012) Simona Petroni et al.   ANALYST

c-axis orientation and piezoelectric coefficients of AlN thin films sputter-deposited on titanium bottom electrodes

(2012) A. Ababneh et al.   APPLIED SURFACE SCIENCE

Polyimide memory: a pithy guideline for future applications

(2012) Tadanori Kurosawa et al.   Polymer Chemistry

Synthesis, Characterization and Dielectric Properties of Rodlike Zinc Oxide-Polyimide Nanocomposites

(2012) Sema Vural et al.   POLYMER-PLASTICS TECHNOLOGY AND ENGINEERING

Deposition of c-axis orientation aluminum nitride films on flexible polymer substrates by reactive direct-current magnetron sputtering

(2012) H. Jin et al.   THIN SOLID FILMS

Influence of substrate crystallography on the room temperature synthesis of AlN thin films by reactive sputtering

(2011) G.F. Iriarte et al.   APPLIED SURFACE SCIENCE

Measurements of Piezoelectric Coefficient of Pulsed-DC Sputtered AlN Thin Films by Piezoresponse Force Microscopy

(2010) J. S. Cherng et al.   FERROELECTRICS

Influence of substrate metals on the crystal growth of AlN films

(2010) Juan Xiong et al.   International Journal of Minerals Metallurgy and Materials

Synthesis of c-axis oriented AlN thin films on different substrates: A review

(2010) G.F. Iriarte et al.   MATERIALS RESEARCH BULLETIN

The influence of sputter deposition parameters on piezoelectric and mechanical properties of AlN thin films

(2010) A. Ababneh et al.   Materials Science and Engineering B-Advanced Functional Solid-State Materials

Influence of oxygen concentration in sputtering gas on piezoelectric response of aluminum nitride thin films

(2008) Morito Akiyama et al.   APPLIED PHYSICS LETTERS

Advances in the Production of Poly(ethylene naphthalate) Fibers

(2008) Peng Chen et al.   Polymer Reviews