Systematic Study of the SiOx Film with Different Stoichiometry by Plasma-Enhanced Atomic Layer Deposition and Its Application in SiOx/SiO2 Super-Lattice

Atomic layer deposition: an enabling technology for the growth of functional nanoscale semiconductors

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Plasma-Enhanced Atomic Layer Deposition of SiN–AlN Composites for Ultra Low Wet Etch Rates in Hydrofluoric Acid

(2016) Yongmin Kim et al.   ACS Applied Materials & Interfaces

Thickness and temperature depending intermixing of SiOx/SiO2 and SiOxNy/SiO2 superlattices: Experimental observation and thermodynamic modeling

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Atomic Layer Deposition of Silicon Nitride from Bis(tert-butylamino)silane and N2 Plasma

(2015) Harm C. M. Knoops et al.   ACS Applied Materials & Interfaces

Photoluminescence and carrier transport mechanisms of silicon-rich silicon nitride light emitting device

(2015) Wugang Liao et al.   APPLIED SURFACE SCIENCE

Si quantum dots in silicon nitride: Quantum confinement and defects

(2015) L. V. Goncharova et al.   JOURNAL OF APPLIED PHYSICS

Observing the morphology of single-layered embedded silicon nanocrystals by using temperature-stable TEM membranes

(2015) Sebastian Gutsch et al.   Beilstein Journal of Nanotechnology

Location and Electronic Nature of Phosphorus in the Si Nanocrystal − SiO2 System

(2015) Dirk König et al.   Scientific Reports

Optical properties and bandgap evolution of ALD HfSiOx films

(2015) Wen Yang et al.   Nanoscale Research Letters

Band alignment and electrical properties of Al2O3/β-Ga2O3 heterojunctions

(2014) Takafumi Kamimura et al.   APPLIED PHYSICS LETTERS

Wide bandgap engineering of (AlGa)2O3 films

(2014) Fabi Zhang et al.   APPLIED PHYSICS LETTERS

Measurement of bandgap energies in low-k organosilicates

(2014) M. T. Nichols et al.   JOURNAL OF APPLIED PHYSICS

Formation of size controlled silicon nanocrystals in nitrogen free silicon dioxide matrix prepared by plasma enhanced chemical vapor deposition

(2014) J. Laube et al.   JOURNAL OF APPLIED PHYSICS

Annealing temperature and barrier thickness effect on the structural and optical properties of silicon nanocrystals/SiO2 superlattices

(2014) J. López-Vidrier et al.   JOURNAL OF APPLIED PHYSICS

Absence of quantum confinement effects in the photoluminescence of Si3N4–embedded Si nanocrystals

(2014) D. Hiller et al.   JOURNAL OF APPLIED PHYSICS

A brief review of atomic layer deposition: from fundamentals to applications

(2014) Richard W. Johnson et al.   Materials Today

Enhanced white photoluminescence in silicon-rich oxide/SiO_2 superlattices by low-energy ion-beam treatment

(2013) Chuan-Feng Shih et al.   OPTICS EXPRESS

Oxygen Plasma and Humidity Dependent Surface Analysis of Silicon, Silicon Dioxide and Glass for Direct Wafer Bonding

(2013) A. U. Alam et al.   ECS Journal of Solid State Science and Technology

Enhancement in electron transport and light emission efficiency of a Si nanocrystal light-emitting diode by a SiCN/SiC superlattice structure

(2013) Chul Huh et al.   Nanoscale Research Letters

Impact of oxygen bonding on the atomic structure and photoluminescence properties of Si-rich silicon nitride thin films

(2012) P. D. Nguyen et al.   JOURNAL OF APPLIED PHYSICS

Charge Trapping Devices Using a Bilayer Oxide Structure

(2012) Moonkyung Kim et al.   JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY

Silicon nanocrystals produced by solid phase crystallisation of superlattices for photovoltaic applications

(2012) S. Janz et al.   Materials Science and Engineering B-Advanced Functional Solid-State Materials

A multilayered approach of Si/SiO to promote carrier transport in electroluminescence of Si nanocrystals

(2012) Ding Li et al.   Nanoscale Research Letters

Formation of size-controlled silicon nanocrystals in plasma enhanced chemical vapor deposition grown SiOxNy/SiO2 superlattices

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Optical characterisation of silicon nanocrystals embedded in SiO2/Si3N4 hybrid matrix for third generation photovoltaics

(2011) Dawei Di et al.   Nanoscale Research Letters

Pb(0) centers at the Si-nanocrystal/SiO2 interface as the dominant photoluminescence quenching defect

(2010) Daniel Hiller et al.   JOURNAL OF APPLIED PHYSICS

Intrinsic optical gain of ultrathin silicon quantum wells from first-principles calculations

(2009) Yuji Suwa et al.   PHYSICAL REVIEW B

A single-poly EEPROM cell for embedded memory applications

(2009) A. Di Bartolomeo et al.   SOLID-STATE ELECTRONICS

Classification and control of the origin of photoluminescence from Si nanocrystals

(2008) S. Godefroo et al.   Nature Nanotechnology