Silicon microstructures through the production of silicon nanowires by metal-assisted chemical etching, used as sacrificial material

Enhancement of electrical parameters in solar grade monocrystalline silicon by external gettering through sacrificial silicon nanowire layer

(2018) Chohdi Amri et al.   MATERIALS RESEARCH BULLETIN

Versatile control of metal-assisted chemical etching for vertical silicon microwire arrays and their photovoltaic applications

(2015) Han-Don Um et al.   Scientific Reports

Bulk Micromachining of Si by Metal-assisted Chemical Etching

(2014) Sang-Mi Kim et al.   Small

Fabrication of porous silicon nanowires by MACE method in HF/H2O2/AgNO3 system at room temperature

(2014) Shaoyuan Li et al.   Nanoscale Research Letters

Ag-Mediated Charge Transport during Metal-Assisted Chemical Etching of Silicon Nanowires

(2013) Nadine Geyer et al.   ACS Applied Materials & Interfaces

Electroassisted Transfer of Vertical Silicon Wire Arrays Using a Sacrificial Porous Silicon Layer

(2013) Jeffrey M. Weisse et al.   NANO LETTERS

Fabrication of Metal Nanobridge Arrays using Sacrificial Silicon Nanowire

(2012) Kook-Nyung Lee et al.   Journal of Electrical Engineering & Technology

Anisotropic characteristics and morphological control of silicon nanowires fabricated by metal-assisted chemical etching

(2012) Kong Liu et al.   JOURNAL OF MATERIALS SCIENCE

Silicon nanotubes from sacrificial silicon nanowires: fabrication and manipulation via embedding in flexible polymers

(2012) Annalisa Convertino et al.   NANOTECHNOLOGY

Catalytic activity of noble metals for metal-assisted chemical etching of silicon

(2012) Shinji Yae et al.   Nanoscale Research Letters

The dual role of silver during silicon etching in HF solution

(2012) Manel Abouda-Lachiheb et al.   Nanoscale Research Letters

3D Out-of-Plane Rotational Etching with Pinned Catalysts in Metal-Assisted Chemical Etching of Silicon

(2011) Owen J. Hildreth et al.   ADVANCED FUNCTIONAL MATERIALS

Generation of cavities in silicon wafers by laser ablation using silicon nitride as sacrificial layer

(2011) B. Lerner et al.   APPLIED SURFACE SCIENCE

How to Make Optimized Arrays of Si Wires Suitable as Superior Anode for Li-Ion Batteries

(2011) E. Quiroga-González et al.   JOURNAL OF THE ELECTROCHEMICAL SOCIETY

Optimization of metal-assisted chemical etching process in fabrication of p-type silicon wire arrays

(2010) Ho-Jin Choi et al.   CURRENT APPLIED PHYSICS

Effect of Catalyst Shape and Etchant Composition on Etching Direction in Metal-Assisted Chemical Etching of Silicon to Fabricate 3D Nanostructures

(2009) Owen James Hildreth et al.   ACS Nano

Densely Packed Arrays of Ultra-High-Aspect-Ratio Silicon Nanowires Fabricated using Block-Copolymer Lithography and Metal-Assisted Etching

(2009) Shih-Wei Chang et al.   ADVANCED FUNCTIONAL MATERIALS

Ordered Arrays of Vertically Aligned [110] Silicon Nanowires by Suppressing the Crystallographically Preferred Etching Directions

(2009) Zhipeng Huang et al.   NANO LETTERS

Motility of Metal Nanoparticles in Silicon and Induced Anisotropic Silicon Etching

(2008) Kuiqing Peng et al.   ADVANCED FUNCTIONAL MATERIALS

Metal-assisted chemical etching of silicon in HF–H2O2

(2008) C. Chartier et al.   ELECTROCHIMICA ACTA