Catalytic activity of noble metals for metal-assisted chemical etching of silicon

Published 2012 View Full Article

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Title
Catalytic activity of noble metals for metal-assisted chemical etching of silicon
Authors
Keywords
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Journal
Nanoscale Research Letters
Volume 7, Issue 1, Pages 352
Publisher
Springer Nature
Online
2012-06-28
DOI
10.1186/1556-276x-7-352
References
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