Impact of Atomic Layer Deposition to Nanophotonic Structures and Devices

Modification and Resonance Tuning of Optical Microcavities by Atomic Layer Deposition

(2014) Jiao Wang et al.   CHEMICAL VAPOR DEPOSITION

Plasmonics in composite nanostructures

(2014) Hong Wei et al.   Materials Today

Subwavelength single layer absorption resonance antireflection coatings

(2014) S.P. Huber et al.   OPTICS EXPRESS

Quantum size effects in TiO2thin films grown by atomic layer deposition

(2014) Massimo Tallarida et al.   Beilstein Journal of Nanotechnology

Effect of substrate overetching and heat treatment of titanium oxide waveguide gratings and thin films on their optical properties

(2013) Muhammad Rizwan Saleem et al.   APPLIED OPTICS

Review on Atomic Layer Deposition and Applications of Oxide Thin Films

(2013) Joice Sophia Ponraj et al.   CRITICAL REVIEWS IN SOLID STATE AND MATERIALS SCIENCES

Guided-Mode Resonant Thermo-Optic Tunable Filters

(2013) Mohammad Jalal Uddin et al.   IEEE PHOTONICS TECHNOLOGY LETTERS

Self-Assembly Based Plasmonic Arrays Tuned by Atomic Layer Deposition for Extreme Visible Light Absorption

(2013) Carl Hägglund et al.   NANO LETTERS

Numerical investigation of one-dimensional nonpolarizing guided-mode resonance gratings with conformal dielectric films

(2013) Yi Yu Li et al.   OPTICS EXPRESS

Thermal properties of thin Al2O3 films and their barrier layer effect on thermo-optic properties of TiO2 films grown by atomic layer deposition

(2013) Muhammad Rizwan Saleem et al.   THIN SOLID FILMS

Tungsten wire grid polarizer for applications in the DUV spectral range

(2012) Thomas Weber et al.   APPLIED OPTICS

ALD-Assisted Multiorder Dispersion Engineering of Nanophotonic Strip Waveguides

(2012) Mikhail Erdmanis et al.   JOURNAL OF LIGHTWAVE TECHNOLOGY

Atomic layer deposition: A versatile technique for plasmonics and nanobiotechnology

(2012) Hyungsoon Im et al.   JOURNAL OF MATERIALS RESEARCH

Hydrogen silsesquioxane resist stamp for replication of nanophotonic components in polymers

(2012) Muhammad Rizwan Saleem   Journal of Micro-Nanolithography MEMS and MOEMS

High aspect ratio deep UV wire grid polarizer fabricated by double patterning

(2012) T. Weber et al.   MICROELECTRONIC ENGINEERING

Thermo-optic coefficient of Ormocomp and comparison of polymer materials in athermal replicated subwavelength resonant waveguide gratings

(2012) Muhammad Rizwan Saleem et al.   OPTICS COMMUNICATIONS

Tubular oxide microcavity with high-index-contrast walls: Mie scattering theory and 3D confinement of resonant modes

(2012) Jiao Wang et al.   OPTICS EXPRESS

Thermal properties of TiO2 films grown by atomic layer deposition

(2012) M.R. Saleem et al.   THIN SOLID FILMS

Mechanical Reinforcement of Nanoparticle Thin Films Using Atomic Layer Deposition

(2011) Majemite I. Dafinone et al.   ACS Nano

Reduced propagation loss in silicon strip and slot waveguides coated by atomic layer deposition

(2011) T. Alasaarela et al.   OPTICS EXPRESS

Towards athermal organic-inorganic guided mode resonance filters

(2011) M. R. Saleem et al.   OPTICS EXPRESS

Single-layer one-dimensional nonpolarizing guided-mode resonance filters under normal incidence

(2011) Tapani Alasaarela et al.   OPTICS LETTERS

Resonant Photonic Biosensors with Polarization-Based Multiparametric Discrimination in Each Channel

(2011) Robert Magnusson et al.   SENSORS

Sensitivity of guided mode resonance filter-based biosensor in visible and near infrared ranges

(2011) Kehui Jia et al.   SENSORS AND ACTUATORS B-CHEMICAL

Atomic Layer Deposition of Dielectric Overlayers for Enhancing the Optical Properties and Chemical Stability of Plasmonic Nanoholes

(2010) Hyungsoon Im et al.   ACS Nano

Plasmonics for improved photovoltaic devices

(2010) Harry A. Atwater et al.   NATURE MATERIALS

The Case for Plasmonics

(2010) M. L. Brongersma et al.   SCIENCE

Atomic Layer Deposition: An Overview

(2009) Steven M. George   CHEMICAL REVIEWS

Gas diffusion ultrabarriers on polymer substrates using Al2O3 atomic layer deposition and SiN plasma-enhanced chemical vapor deposition

(2009) P. F. Carcia et al.   JOURNAL OF APPLIED PHYSICS

Feature size reduction of silicon slot waveguides by partial filling using atomic layer deposition

(2009) Tapani Alasaarela   OPTICAL ENGINEERING

Angled sidewalls in silicon slot waveguides: conformal filling and mode properties

(2009) A. Säynätjoki et al.   OPTICS EXPRESS

Effects of oxygen flow ratios and annealing temperatures on Raman and photoluminescence of titanium oxide thin films deposited by reactive magnetron sputtering

(2009) C.K. Chung et al.   THIN SOLID FILMS

Low temperature atomic layer deposition of titania thin films

(2009) G. Triani et al.   THIN SOLID FILMS

Plasmonic nanocavity arrays for enhanced efficiency in organic photovoltaic cells

(2008) Nathan C. Lindquist et al.   APPLIED PHYSICS LETTERS

Stability of Silver Nanoparticles Fabricated by Nanosphere Lithography and Atomic Layer Deposition to Femtosecond Laser Excitation

(2008) Jiha Sung et al.   Journal of Physical Chemistry C

Plasmonic Nanostructure Design for Efficient Light Coupling into Solar Cells

(2008) Vivian E. Ferry et al.   NANO LETTERS

Applications of atomic layer deposition to nanofabrication and emerging nanodevices

(2008) Hyungjun Kim et al.   THIN SOLID FILMS