Thermal properties of TiO2 films grown by atomic layer deposition

Title
Thermal properties of TiO2 films grown by atomic layer deposition
Authors
Keywords
-
Journal
THIN SOLID FILMS
Volume 520, Issue 16, Pages 5442-5446
Publisher
Elsevier BV
Online
2012-04-13
DOI
10.1016/j.tsf.2012.04.008

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