Effects of oxygen flow ratios and annealing temperatures on Raman and photoluminescence of titanium oxide thin films deposited by reactive magnetron sputtering

Title
Effects of oxygen flow ratios and annealing temperatures on Raman and photoluminescence of titanium oxide thin films deposited by reactive magnetron sputtering
Authors
Keywords
-
Journal
THIN SOLID FILMS
Volume 518, Issue 5, Pages 1415-1418
Publisher
Elsevier BV
Online
2009-10-02
DOI
10.1016/j.tsf.2009.09.076

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