Effect of substrate overetching and heat treatment of titanium oxide waveguide gratings and thin films on their optical properties

Title
Effect of substrate overetching and heat treatment of titanium oxide waveguide gratings and thin films on their optical properties
Authors
Keywords
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Journal
APPLIED OPTICS
Volume 52, Issue 3, Pages 422
Publisher
The Optical Society
Online
2013-01-16
DOI
10.1364/ao.52.000422

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