Atomic layer deposition: A versatile technique for plasmonics and nanobiotechnology
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Title
Atomic layer deposition: A versatile technique for plasmonics and nanobiotechnology
Authors
Keywords
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Journal
JOURNAL OF MATERIALS RESEARCH
Volume 27, Issue 04, Pages 663-671
Publisher
Cambridge University Press (CUP)
Online
2012-01-19
DOI
10.1557/jmr.2011.434
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