Feature size reduction of silicon slot waveguides by partial filling using atomic layer deposition

Published 2009 View Full Article

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Title
Feature size reduction of silicon slot waveguides by partial filling using atomic layer deposition
Authors
Keywords
-
Journal
OPTICAL ENGINEERING
Volume 48, Issue 8, Pages 080502
Publisher
SPIE-Intl Soc Optical Eng
Online
2009-08-19
DOI
10.1117/1.3206731
References
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