A simple approach to the fabrication of fluorine-doped zinc oxide thin films by atomic layer deposition at low temperatures and an investigation into the growth mode
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Title
A simple approach to the fabrication of fluorine-doped zinc oxide thin films by atomic layer deposition at low temperatures and an investigation into the growth mode
Authors
Keywords
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Journal
Journal of Materials Chemistry C
Volume 2, Issue 1, Pages 98-108
Publisher
Royal Society of Chemistry (RSC)
Online
2013-10-24
DOI
10.1039/c3tc31478b
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