A simple approach to the fabrication of fluorine-doped zinc oxide thin films by atomic layer deposition at low temperatures and an investigation into the growth mode

标题
A simple approach to the fabrication of fluorine-doped zinc oxide thin films by atomic layer deposition at low temperatures and an investigation into the growth mode
作者
关键词
-
出版物
Journal of Materials Chemistry C
Volume 2, Issue 1, Pages 98-108
出版商
Royal Society of Chemistry (RSC)
发表日期
2013-10-24
DOI
10.1039/c3tc31478b

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