Investigation of the Dielectric and Mechanical Properties for Magnetron Sputtered BCN Thin Films
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Title
Investigation of the Dielectric and Mechanical Properties for Magnetron Sputtered BCN Thin Films
Authors
Keywords
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Journal
ECS Journal of Solid State Science and Technology
Volume 4, Issue 1, Pages N3122-N3126
Publisher
The Electrochemical Society
Online
2014-11-15
DOI
10.1149/2.0191501jss
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