PECVD low-permittivity organosilicate glass coatings: Adhesion, fracture and mechanical properties

Published 2008 View Full Article

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Title
PECVD low-permittivity organosilicate glass coatings: Adhesion, fracture and mechanical properties
Authors
Keywords
-
Journal
ACTA MATERIALIA
Volume 56, Issue 17, Pages 4932-4943
Publisher
Elsevier BV
Online
2008-07-04
DOI
10.1016/j.actamat.2008.06.007

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