Investigation of the Dielectric and Mechanical Properties for Magnetron Sputtered BCN Thin Films

Progress in the development and understanding of advanced low k and ultralow k dielectrics for very large-scale integrated interconnects—State of the art

(2014) Alfred Grill et al.   Applied Physics Reviews

Valence band offset and Schottky barrier at amorphous boron and boron carbide interfaces with silicon and copper

(2013) Sean W. King et al.   APPLIED SURFACE SCIENCE

Noncontact optical metrologies for Young’s modulus measurements of nanoporous low-k dielectric thin films

(2013) Brian C. Daly et al.   Journal of Nanophotonics

Influence of network bond percolation on the thermal, mechanical, electrical and optical properties of high and low-k a-SiC:H thin films

(2013) Sean W. King et al.   JOURNAL OF NON-CRYSTALLINE SOLIDS

Doping and electrical properties of cubic boron nitride thin films: A critical review

(2013) X.W. Zhang   THIN SOLID FILMS

Research Updates: The three M's (materials, metrology, and modeling) together pave the path to future nanoelectronic technologies

(2013) Sean W. King et al.   APL Materials

Conduction and material transport phenomena of degradation in electrically stressed ultra low-k dielectric before breakdown

(2012) T. Breuer et al.   JOURNAL OF APPLIED PHYSICS

A review of monolithic and multilayer coatings within the boron–carbon–nitrogen system by ion-beam-assisted deposition

(2012) Ignacio Jiménez et al.   JOURNAL OF MATERIALS RESEARCH

Tailored amorphous silicon carbide barrier dielectrics by nitrogen and oxygen doping

(2012) Yusuke Matsuda et al.   THIN SOLID FILMS

Film Property Requirements for Hermetic Low-k a-SiOxCyNz:H Dielectric Barriers

(2012) S. W. King et al.   ECS Journal of Solid State Science and Technology

X-ray Photoelectron Spectroscopy Investigation of the Schottky Barrier at a-BN:H∕Cu Interfaces

(2011) S. W. King et al.   ELECTROCHEMICAL AND SOLID STATE LETTERS

Plasma enhanced atomic layer deposition of SiNx:H and SiO2

(2011) Sean W. King   JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A

Moore’s crystal ball: Device physics and technology past the 15nm generation

(2011) Kelin J. Kuhn   MICROELECTRONIC ENGINEERING

Capacitance measurements and k-value extractions of low-k films

(2010) Ivan Ciofi et al.   MICROELECTRONIC ENGINEERING

Speciation of BC x N y films grown by PECVD with trimethylborazine precursor

(2009) Olaf Baake et al.   ANALYTICAL AND BIOANALYTICAL CHEMISTRY

PECVD low-permittivity organosilicate glass coatings: Adhesion, fracture and mechanical properties

(2008) Youbo Lin et al.   ACTA MATERIALIA

Characterization of BCN films synthesized by radiofrequency plasma enhanced chemical vapor deposition

(2008) Md. Abdul Mannan et al.   JOURNAL OF PHYSICS AND CHEMISTRY OF SOLIDS