Temperature dependent in situ doping of ALD ZnO

Aluminum doped zinc oxide films grown by atomic layer deposition for organic photovoltaic devices

(2010) Hanna Saarenpää et al.   SOLAR ENERGY MATERIALS AND SOLAR CELLS

Deposition of Al doped ZnO layers with various electrical types by atomic layer deposition

(2010) Cheol Hyoun Ahn et al.   THIN SOLID FILMS

Structure and stimulated emission of a high-quality zinc oxide epilayer grown by atomic layer deposition on the sapphire substrate

(2010) H.C. Chen et al.   THIN SOLID FILMS

Atomic Layer Deposition: An Overview

(2009) Steven M. George   CHEMICAL REVIEWS

ZnO layers grown by Atomic Layer Deposition: A new material for transparent conductive oxide

(2009) M. Godlewski et al.   THIN SOLID FILMS

Monocrystalline zinc oxide films grown by atomic layer deposition

(2009) Ł. Wachnicki et al.   THIN SOLID FILMS

The influence of growth temperature and precursors’ doses on electrical parameters of ZnO thin films grown by atomic layer deposition technique

(2008) T. Krajewski et al.   MICROELECTRONICS JOURNAL

Improved conductivity of ZnO through codoping with In and Al

(2008) S.D. Kirby et al.   THIN SOLID FILMS

Controlling of preferential growth mode of ZnO thin films grown by atomic layer deposition

(2007) A. Wójcik et al.   JOURNAL OF CRYSTAL GROWTH

Spectroscopic ellipsometry study of transparent conductive ZnO layers for CIGS solar cell applications

(2007) Á. Németh et al.   THIN SOLID FILMS

ZnO thin films prepared by atomic layer deposition and rf sputtering as an active layer for thin film transistor

(2007) S.J. Lim et al.   THIN SOLID FILMS