The improvement of thin film barrier performances of organic–inorganic hybrid nanolaminates employing a low-temperature MLD/ALD method

Title
The improvement of thin film barrier performances of organic–inorganic hybrid nanolaminates employing a low-temperature MLD/ALD method
Authors
Keywords
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Journal
RSC Advances
Volume 4, Issue 83, Pages 43850-43856
Publisher
Royal Society of Chemistry (RSC)
Online
2014-09-05
DOI
10.1039/c4ra06638c

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