The low temperature atomic layer deposition of ruthenium and the effect of oxygen exposure

Atomic Layer Deposition of Ruthenium Using the Novel Precursor bis(2,6,6-trimethyl-cyclohexadienyl)ruthenium

(2011) Keith Gregorczyk et al.   CHEMISTRY OF MATERIALS

Local Epitaxial Growth of Ru Thin Films by Atomic Layer Deposition at Low Temperature

(2011) Seong Keun Kim et al.   JOURNAL OF THE ELECTROCHEMICAL SOCIETY

In-situ real-time ellipsometric investigations during the atomic layer deposition of ruthenium: A process development from [(ethylcyclopentadienyl)(pyrrolyl)ruthenium] and molecular oxygen

(2011) Martin Knaut et al.   JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A

Atomic Layer Deposition of Ru/RuO2Thin Films Studied by In situ Infrared Spectroscopy

(2010) S. K. Park et al.   CHEMISTRY OF MATERIALS

Investigation on the Growth Initiation of Ru Thin Films by Atomic Layer Deposition

(2010) Seong Keun Kim et al.   CHEMISTRY OF MATERIALS

Mono-Energetic Neutron Source by 7Li(p,n)7Be Reaction

(2010) Kim gi Dong   JOURNAL OF THE KOREAN PHYSICAL SOCIETY

Atomic Layer Deposition: An Overview

(2009) Steven M. George   CHEMICAL REVIEWS

The Effect of Precursor Ligands on the Deposition Characteristics of Ru Films by MOCVD

(2009) Kazuhisa Kawano et al.   ELECTROCHEMICAL AND SOLID STATE LETTERS

Low Temperature Atomic Layer Deposition of Ruthenium Thin Films Using Isopropylmethylbenzene-Cyclohexadiene-Ruthenium and O[sub 2]

(2009) Tae-Kwang Eom et al.   ELECTROCHEMICAL AND SOLID STATE LETTERS

Initial surface reactions of atomic layer deposition

(2009) Jiyoung Kim et al.   JOM

The Role of the Methyl and Hydroxyl Groups of Low-k Dielectric Films on the Nucleation of Ruthenium by ALD

(2008) Jaeyeong Heo et al.   ELECTROCHEMICAL AND SOLID STATE LETTERS

Nucleation kinetics of Ru on silicon oxide and silicon nitride surfaces deposited by atomic layer deposition

(2008) Sung-Soo Yim et al.   JOURNAL OF APPLIED PHYSICS

Effect oxygen exposure on the quality of atomic layer deposition of ruthenium from bis(cyclopentadienyl)ruthenium and oxygen

(2008) Sang-Joon Park et al.   THIN SOLID FILMS