Structural and optical characterization of low-temperature ALD crystalline AlN

Published 2015 View Full Article

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Title
Structural and optical characterization of low-temperature ALD crystalline AlN
Authors
Keywords
A3. Atomic layer deposition, B1. Aluminum nitride, Optical band gap, Oxygen impurity, Refractive index
Journal
JOURNAL OF CRYSTAL GROWTH
Volume 421, Issue -, Pages 45-52
Publisher
Elsevier BV
Online
2015-04-18
DOI
10.1016/j.jcrysgro.2015.04.009

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