Buffer optimization for crack-free GaN epitaxial layers grown on Si(1 1 1) substrate by MOCVD

Title
Buffer optimization for crack-free GaN epitaxial layers grown on Si(1 1 1) substrate by MOCVD
Authors
Keywords
-
Journal
JOURNAL OF PHYSICS D-APPLIED PHYSICS
Volume 41, Issue 15, Pages 155317
Publisher
IOP Publishing
Online
2008-07-19
DOI
10.1088/0022-3727/41/15/155317

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