Nonuniform doping distribution along silicon nanowires measured by Kelvin probe force microscopy and scanning photocurrent microscopy

Published 2009 View Full Article

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Title
Nonuniform doping distribution along silicon nanowires measured by Kelvin probe force microscopy and scanning photocurrent microscopy
Authors
Keywords
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Journal
APPLIED PHYSICS LETTERS
Volume 95, Issue 9, Pages 092105
Publisher
AIP Publishing
Online
2009-09-02
DOI
10.1063/1.3207887
References
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