Chemisorption of Tetrakis(dimethylamido)titanium on Si(100)-2 × 1: C−H and C−N Bond Reactivity Leading to Low-Temperature Decomposition Pathways

Title
Chemisorption of Tetrakis(dimethylamido)titanium on Si(100)-2 × 1: C−H and C−N Bond Reactivity Leading to Low-Temperature Decomposition Pathways
Authors
Keywords
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Journal
Journal of Physical Chemistry C
Volume 112, Issue 26, Pages 9695-9705
Publisher
American Chemical Society (ACS)
Online
2008-06-11
DOI
10.1021/jp800436w

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