Quartz Crystal Microbalance Studies of Al2O3Atomic Layer Deposition Using Trimethylaluminum and Water at 125 °C†

Title
Quartz Crystal Microbalance Studies of Al2O3Atomic Layer Deposition Using Trimethylaluminum and Water at 125 °C†
Authors
Keywords
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Journal
JOURNAL OF PHYSICAL CHEMISTRY A
Volume 114, Issue 3, Pages 1281-1289
Publisher
American Chemical Society (ACS)
Online
2009-09-17
DOI
10.1021/jp9049268

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