Growth morphology and electrical/optical properties of Al-doped ZnO thin films grown by atomic layer deposition
出版年份 2012 全文链接
标题
Growth morphology and electrical/optical properties of Al-doped ZnO thin films grown by atomic layer deposition
作者
关键词
-
出版物
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A
Volume 30, Issue 2, Pages 021202
出版商
American Vacuum Society
发表日期
2012-03-05
DOI
10.1116/1.3687939
参考文献
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- Preparation and properties of SnS film grown by two-stage process
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- Structure and stimulated emission of a high-quality zinc oxide epilayer grown by atomic layer deposition on the sapphire substrate
- (2010) H.C. Chen et al. THIN SOLID FILMS
- Room temperature deposition of Al-doped ZnO films on quartz substrates by radio-frequency magnetron sputtering and effects of thermal annealing
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