Room temperature deposition of Al-doped ZnO films on quartz substrates by radio-frequency magnetron sputtering and effects of thermal annealing

Published 2010 View Full Article

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Title
Room temperature deposition of Al-doped ZnO films on quartz substrates by radio-frequency magnetron sputtering and effects of thermal annealing
Authors
Keywords
-
Journal
THIN SOLID FILMS
Volume 519, Issue 1, Pages 31-36
Publisher
Elsevier BV
Online
2010-07-17
DOI
10.1016/j.tsf.2010.07.048

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