Room temperature deposition of Al-doped ZnO thin films on glass by RF magnetron sputtering under different Ar gas pressure

Title
Room temperature deposition of Al-doped ZnO thin films on glass by RF magnetron sputtering under different Ar gas pressure
Authors
Keywords
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Journal
JOURNAL OF ALLOYS AND COMPOUNDS
Volume 509, Issue 2, Pages 421-425
Publisher
Elsevier BV
Online
2010-09-18
DOI
10.1016/j.jallcom.2010.09.047

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