Spatial atomic layer deposition: A route towards further industrialization of atomic layer deposition
出版年份 2011 全文链接
标题
Spatial atomic layer deposition: A route towards further industrialization of atomic layer deposition
作者
关键词
-
出版物
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A
Volume 30, Issue 1, Pages 010802
出版商
American Vacuum Society
发表日期
2011-12-15
DOI
10.1116/1.3670745
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