Atomic Layer Deposition of Al2O3 and ZnO at Atmospheric Pressure in a Flow Tube Reactor

Published 2011 View Full Article

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Title
Atomic Layer Deposition of Al2O3 and ZnO at Atmospheric Pressure in a Flow Tube Reactor
Authors
Keywords
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Journal
ACS Applied Materials & Interfaces
Volume 3, Issue 2, Pages 299-308
Publisher
American Chemical Society (ACS)
Online
2011-01-26
DOI
10.1021/am100940g

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