Hybrid organic–inorganic sol–gel materials for micro and nanofabrication
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Title
Hybrid organic–inorganic sol–gel materials for micro and nanofabrication
Authors
Keywords
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Journal
JOURNAL OF SOL-GEL SCIENCE AND TECHNOLOGY
Volume 60, Issue 3, Pages 299-314
Publisher
Springer Nature
Online
2011-09-07
DOI
10.1007/s10971-011-2562-0
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